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| Year | Deputy | Home Valley |
| 1863-1865 | Charles R. Starkweather | Chicago |
| 1865-1867 | Hosmer A. Johnson | Chicago |
| 1867-1869 | Walter A. Stevens | Chicago |
| 1869-1872 | Vincent L. Hurlbut | Chicago |
| 1872-1881 | Hosmer A. Johnson | Chicago |
| 1881-1883 | Henry H. Pond | Special Appointment |
| 1883-1900 | John C. Smith | Freeport |
| 1900-1911 | Amos Pettibone | Chicago |
| 1911-1914 | James B. McFatrich | Chicago |
| 1914-1932 | Sylvester O. Spring | Peoria |
| 1932-1945 | Delmar D. Darrah | Bloomington |
| 1945-1947 | Aubrey Prosser | Chicago |
| 1947-1963 | Carl A. Miller | Chicago |
| 1963-1971 | Louis L. Williams | Bloomington |
| 1971-1974 | Myron K. Lingle | Springfield |
| 1974-1981 | George E. Burrow | Danville |
| 1981-1986 | Robert B. Perkins | Southern Illinois |
| 1986-1992 | Robert L. Giesel | Chicago |
| 1992-2000 | Norman R. Buecker | Springfield |
| 2000-2005 | Phillip C. Kenny | Peoria |
| 2005-2007 | Lawrence D. Inglis | Chicago |
| 2007-2011 | Lee B. Lockwood | Freeport |
| 2011-2017 | Benny L. Grisham | Springfield |
| 2017-2018 | John T. Phillips | Chicago |
| 2018-2025 | Gregory L. Clark | Bloomington |
| 2025-Present | G. Nicholas Graff | Peoria |